Discussion on energy conservation measures of cleanrooms in microelectronics industry(1)—Reasonable determination of cleanroom parameters

After more than 50 years of development, Chinas microelectronics industry has earned great achievement. The training of relevant practitioners has created the foundation for continuously quality improvement and shortcoming complement. Improving energy efficiency and conservation have become important aspects of the microelectronics industry development. In this paper, some experiences are provided on reasonable determination of cleanroom parameters. Some suggestions are put forward on reasonably reducing the air supply rate of the cleanrooms, creating the partial clean microenvironment to reduce the area required for high cleanliness level, improving the local exhaust effect, reducing air leakage, and reasonably determining the temperature and humidity parameters in the cleanrooms.